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Base excited micro-cantilevers, also called as acoustically excited micro-cantilevers are commonly used for dynamic microscopy. Here, theoretical analysis of parametrically excited such cantilever, immersed in viscous fluids is shown. Effect of viscous drag and hydrodynamic loading on frequency response curve has been examined. Parametric actuation is applied using feedback for the base excitation. The excitation induces nonlinearity in system. Mathematical model of the system is derived with consideration of feedback. The theoretical analysis of parametric excitation and also the experiments performed in the other works demonstrates sharp and high peak in frequency response. Such response is very essential for sensing. The effect of viscous environment on resonance frequency, sharpness and height of peak is investigated.
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