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Amongst various harmful gases ammonia is one of the most hazardous gases and hence early detection is essentially required. In order to detect ammonia from unreachable places such as mines, Surface Acoustic Wave (SAW) sensors scores over other sensors since they support wireless sensing under ambient conditions. Besides that high sensitivity and low limit of detection further adds to the advantages of SAW sensors. In order to further improves the sensitivity and to achieve lower limit of detection reflectors are placed on the both sides of the SAW device in order to confine the energy and improve the sensitivity, such a device is called as SAW resonator. In order to avoid false alarm due to temperature variation, zero Temperature coefficient of delay (TCD) substrate i.e. ST Quartz was used for the fabrication of SAW based ammonia sensor. In the present work SAW resonators have been fabricated on ST Quartz substrate using conventional photolithography technique. Suitable metal oxide sensing layer for the ammonia detection is optimized and deposited using rf sputtering technique. The fabricated devices were packaged and tested in controlled environment for different concentrations of ammonia gas. Considerable and linearly increasing shift in the frequency was observed on increasing the concentration of ammonia gas.
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